ISSN 2687-0568

Study of Optical and Structural Properties of β-(AlxGa1–x)2O3 Thin Films Grown by Spray Pyrolysis Technique

Authors
X. Zhang , D.I. Panov 1 , V.A. Spiridonov 1 , D.A. Bauman 1 , A.E. Romanov 1

1 ITMO University, Kronverkskiy pr., 49, lit. A, Saint Petersburg, 197101, Russia

Rev. Adv. Mater. Technol., 2024, vol. 6, no. 2, pp. 62–66
Abstract

The work demonstrates the synthesis of thin films of β-(AlxGa1–x)2O3 by spray pyrolysis method. Temperature conditions for sol synthesis are determined to obtain thin films with a specified content of aluminum. The films are studied by scanning electron microscopy, energy-dispersive X-ray spectroscopy and optical spectroscopy. The aluminum content in the fabricated β-(AlxGa1–x)2O3 films is about 3.6 at.%. The optical band gap of the films is determined as 5.0 eV.

Keywords
β-(AlxGa1–x)2O3; Thin films; Sol-gel; Spray pyrolysis; Optical band gap
Foundings

Russian Science Foundation: 24-12-00229.

References
Volume 6, No 2
pages 62-66
History
© 2024 ITMO University.
This is an open access article under the terms
of the CC BY-NC 4.0 license.
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