- Main
- / View Articles
- / Volume 4 No 4 2022
- / 1
Review on Single-Mode Vertical-Cavity Surface-Emitting Lasers for High-Speed Data Transfer
Authors
S.S. Rochas 1 , Ya.N. Kovach 1 , P.E. Kopytov 1 , A.V. Kremleva 1 , A.Yu. Egorov 11 Institute of Advanced Data Transfer Systems, ITMO University, Kronverksky Pr. 49, bldg. A, St. Petersburg, 197101, Russia
Rev. Adv. Mater. Technol., 2022, vol. 4, no. 4, pp. 1–16
Abstract
Vertical-cavity surface-emitting lasers (VCSELs) are wide-spread laser sources for different applications in optical communication and sensing. The evolution of fabrication processes and new technological approaches allow to obtain high-Q single-mode VCSELs with data rates more than 100 Gbps. This review discusses basic designs and construction features of VCSELs that effect on their applications. The advances over the past 20 years for single-mode VCSELs of 850 nm, 1300 nm and 1550 nm wavelength ranges are presented.
Keywords
VCSEL; Fiber-optic communication lines; Telecommunications; Single-mode; Data rateFoundings
scientific school: No. 5082.2022.4
- Y.M. Manaserh, M.I. Tradat, D. Bani-Hani, A. Alfallah, B.G. Sammakia, K. Nemati, M.J. Seymour, Machine learning assisted development of IT equipment compact models for data centers energy planning, Appl. Energy, 2022, vol. 305, art. no. 117846.
- H.B. Barua, K.C. Mondal, S. Khatua, Green Computing for Big Data and Machine Learning, in: Proc. CODS-COMAD 2022: 5th Joint International Conference on Data Science & Management of Data (9th ACM IKDD CODS and 27th COMAD), ed. by G. Dasgupta, Y. Simmhan, B.V. Srinivasan, S. Bhomwick, A. Singhee, M. Ramanath, N. Batra, Association for Computing Machinery, 2022, pp. 348–351.
- A.M. Hassan, X. Gu, M. Nakahama, S. Shinada, M. Ahmed, F. Koyama, High power and high beam quality surface grating VCSEL, in: Conference on Lasers and Electro-Optics, ed. by J. Kang, S. Tomasulo, I. Ilev, D. Müller, N. Litchinitser, S. Polyakov, V. Podolskiy, J. Nunn, C. Dorrer, T. Fortier, Q. Gan, C. Saraceno, OSA Technical Digest, 2021, art. no. STh1G.5.
- J.A. Lott, N.N. Ledentsov, V.M. Ustinov, N.A. Maleev, A.E. Zhukov, A.R. Kovsh, M.V. Maximov, B.V. Volovik, Z.I. Alferov, D. Bimberg, InAs-InGaAs quantum dot VCSELs on GaAs substrates emitting at 1.3 μm, Electron. Lett., 2000, vol. 36, no. 16, pp. 1384–1385.
- M.J. Miah, A. Al-Samaneh, A. Kern, D. Wahl, P. Debernardi, R. Michalzik, Fabrication and characterization of low-threshold polarization-stable VCSELs for Cs-based miniaturized atomic clocks, IEEE J. Sel. Top. Quantum Electron., 2013, vol. 19, no. 4, art. no. 1701410.
- A. Mutig, J.A. Lott, S.A. Blokhin, P. Moser, P. Wolf, W. Hofmann, A.A. Nadtochiy, D. Bimberg, Modulation characteristics of high-speed and high-temperature stable 980 nm range VCSELs operating error free at 25 Gbit/s up to 85 °C, IEEE J. Sel. Top. Quantum Electron., 2011, vol. 17, no. 6, pp. 1568–1575.
- H. Li, P. Wolf, P. Moser, G. Larisch, J.A. Lott, D. Bimberg, Temperature-stable, energy-efficient, and high-bit rate oxide-confined 980-nm VCSELs for optical interconnects, IEEE J. Sel. Top. Quantum Electron., 2015, vol. 21, no. 6, art. no. 1700409.
- A. Larsson, Advances in VCSELs for communication and sensing, IEEE J. Sel. Top. Quantum Electron., 2011, vol. 17, no. 6, pp. 1552–1567.
- M. Grabherr, H. Moench, A. Pruijmboom, VCSELs for Optical Mice and Sensing, in: VCSELs: Fundamentals, Technology and Applications of Vertical-Cavity Surface-Emitting Lasers, ed. by R. Michalzik, Springer Series in Optical Sciences, vol. 166, Springer, Berlin, Heidelberg, 2013, pp. 521–538.
- D.K. Serkland, G.M. Peake, K.M. Geib, R. Lutwak, R.M. Garvey, M. Varghese, M. Mescher, VCSELs for atomic clocks, Proc. SPIE 6132, Vertical-Cavity Surface-Emitting Lasers X, 2006, art. no. 613208.
- S. Liverman, H. Bialek, A. Natarajan, A.X. Wang, VCSEL array-based gigabit free-space optical femtocell communication, J. Light. Technol., 2020, vol. 38, no. 7, pp. 1659–1667.
- H.Y. Kao, C.T. Tsai, Y.C. Chi, C.Y. Peng, S.F. Leong, H.Y. Wang, C.H. Cheng, W.L. Wu, H.C. Kuo, W.H. Cheng, C.H. Wu, G.R. Lin, Long-term thermal stability of single-mode VCSEL under 96-Gbit/s OFDM transmission, IEEE J. Sel. Top. Quantum Electron., 2019, vol. 25, no. 6, art. no. 1500609.
- A. Kern, A. Al-Samaneh, D. Wahl, R. Michalzik, Monolithic VCSEL-PIN photodiode integration for bidirectional optical data transmission, IEEE J. Sel. Top. Quantum Electron., 2013, vol. 19, no. 4, art. no. 6100313.
- J. Zou, S.A. Sasu, M. Lawin, A. Dochhan, J.P. Elbers, M. Eiselt, Advanced optical access technologies for next-generation (5G) mobile networks, J. Opt. Commun. Netw., 2020, vol. 12, no. 10, pp. D86–D98.
- S. Wassin, G.M. Isoe, R.R.G. Gamatham, A.W.R. Leitch, T.B. Gibbon, Highly accurate pulse-per-second timing distribution over optical fibre network using VCSEL side-mode injection, Proc. SPIE 10129, Optical Metro Networks and Short-Haul Systems IX, 2017, art. no. 101290G.
- N. Kohmu, M. Ishii, T. Ishigure, High-density electrical and optical assembly for subminiature VCSEL-based optical engine, IEEE Trans. Components Packag. Manuf. Technol., 2022, vol. 12, no. 1, pp. 27–36.
- G.M. Isoe, S. Wassin, A.W.R. Leitch, T.B. Gibbon,
60 Gbps 4-PAM VCSEL-based Raman assisted hyper-scale data centre: In context of spectral efficiency and reach extension, Opt. Commun., 2018, vol. 428, pp. 164–168. - B. Corbett, R. Loi, J. O’Callaghan, G. Roelkens, Transfer printing for silicon photonics, in: Semiconductors and semimetals, vol. 99, ed. by S. Lourdudoss, R.T. Chen, C. Jagadish, Elsevier, 2018, pp. 43–70.
- S. Spiga, M.C. Amann, High-speed InP-based long-wavelength VCSELs, in: Green photonics and electronics. Nanoscience and technology, ed. by G. Eisenstein, D. Bimberg, Springer, Cham, 2017, pp. 17–35.
- L. Carroll, J.-S. Lee, C. Scarcella, K. Gradkowski, M. Duperron, H. Lu, Y. Zhao, C. Eason, P. Morrissey, M. Rensing, S. Collins, H.Y. Hwang, P. O’Brien, Photonic packaging: Transforming silicon photonic integrated circuits into photonic devices, Appl. Sci, 2016, vol. 6, no. 12, art. no. 426.
- J. Bashir, E. Peter, S.R. Sarangi, A survey of on-chip optical interconnects, ACM Computing Surveys, 2019, vol. 51, no. 6, pp. 1–34.
- J.A. Tatum, G.D. Landry, D. Gazula, J.K. Wade, P. Westbergh, VCSEL-based optical transceivers for future data center applications, in: Optical Fiber Communications Conference, OSA Technical Digest (online), Optical Publishing Group, 2018, art. no. M3F.6.
- K. Iga, VCSEL: born small and grown big, Proc. SPIE 11263, Vertical External Cavity Surface Emitting Lasers (VECSELs) X, 2020, art. no. 1126302.
- W. Fu, H. Wu, D. Wu, M. Feng, D. Deppe, Cryogenic oxide-VCSELs with bandwidth over 50 GHz at 82 K for next-gen high-speed computing, in: Optical Fiber Communication Conference (OFC) 2021, ed. by P. Dong, J. Kani, C. Xie, R. Casellas, C. Cole, M. Li, OSA Technical Digest, Optica Publishing Group, 2021, art. no. Tu5C.4.
- N. Mukoyama, H. Otoma, J. Sakurai, N. Ueki, H. Nakayama, VCSEL array-based light exposure system for laser printing, Proc. SPIE 6908, Vertical-Cavity Surface-Emitting Lasers XII, 2008, art. no. 69080H.
- A.B. Ikyo, I.P. Marko, K. Hild, A.R. Adams, S. Arafin, M.C. Amann, S.J. Sweeney, Temperature stable mid-infrared GaInAsSb/GaSb Vertical Cavity Surface Emitting Lasers (VCSELs), Sci. Rep., 2016, vol. 6, art. no. 19595.
- H. Moench, M. Frey, M. Grabherr, S. Gronenborn, R. Gudde, J. Kolb, M. Miller, A. Weigl, VCSELs as light source for time-of-flight sensors, Proc. SPIE 10122, Vertical-Cavity Surface-Emitting Lasers XXI, 2017, art. no. 1012204.
- Y. Li, J. Ibanez-Guzman, Lidar for autonomous driving: The principles, challenges, and trends for automotive lidar and perception systems, IEEE Signal Process. Mag., 2020, vol. 37, no. 4, pp. 50–61.
- Y. Kovach, A. Petrenko, S. Rochas, D. Shiryaev, A. Borodkin, E. Kolodeznyi, Ring-shaped contamination detection system, in: International Youth Conference on Electronics, Telecommunications and Information Technologies, Springer Proceedings in Physics, vol. 268, ed. by E. Velichko, V. Kapralova, P. Karaseov, S. Zavjalov, P. Angueira, S. Andreev, Springer, Cham, 2022, pp. 421–427.
- B.D. Padullaparthi, J.A. Tatum, K. Iga, VCSEL Industry: Communication and Sensing, Wiley, New York, 2021.
- S. Zhuo, Y. Wang, T. Xia, Y. Wu, W. Zheng, M. Sun, Z. Lin, P.Y. Chang, A 200 MHz 14 W Pulsed Optical Illuminator with Laser Driver ASIC and On-chip DLL-Based Time Interpolator for Indirect Time-of-Flight Applications, IEEE Trans. Circuits Syst. II Express Briefs, 2022, pp. 1.
- R. Michalzik, VCSEL Fundamentals, in: VCSELs: Fundamentals, Technology and Applications of Vertical-Cavity Surface-Emitting Lasers, ed. by R. Michalzik, Springer Series in Optical Sciences, vol 166, Springer, Berlin, Heidelber, 2013, pp. 19–75.
- R.M. France, J. Buencuerpo, M. Bradsby, J.F. Geisz, Y. Sun, P. Dhingra, M.L. Lee, M. A. Steiner, Graded buffer Bragg reflectors with high reflectivity and transparency for metamorphic optoelectronics, J. Appl. Phys., 2021, vol. 129, no. 17, art. no. 173102.
- M. Anaya, A. Rubino, M.E. Calvo, H. Míguez, Solution processed high refractive index contrast distributed Bragg reflectors, J. Mater. Chem. C, 2016, vol. 4, no. 20, pp. 4532–4537.
- I.O. Akhundov, D.M. Kazantsev, V.L. Alperovich, N.S. Rudaya, E.E. Rodyakina, A.V. Latyshev, Formation and interaction of dislocation-induced and vicinal monatomic steps on a GaAs(001) surface under stress relaxation, Scr. Mater., 2016, vol. 114, pp. 125–128.
- R.S. Adrain, J. Watson, Laser microspectral analysis: A review of principles and applications, J. Phys. D. Appl. Phys., 1984, vol. 17, no. 10, pp. 1915–1940.
- H. Gebretsadik, Growth and characterization of defect-free GaAs/AlAs distributed Bragg reflector mirrors on patterned InP-based heterostructures, J. Vac. Sci. Technol. B, 1998, vol. 16, no. 3, pp. 1417–1421.
- J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J.C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, J. Jacquet, Metamorphic DBR and tunnel-junction injection. A CW RT monolithic long-wavelength VCSEL, IEEE J. Sel. Top. Quantum Electron., 1999, vol. 5, no. 3, pp. 520–529.
- K.M. Gupta, N. Gupta, Recent Advances in Semiconducting Materials and Devices, in: Advanced Semiconducting Materials and Devices. Engineering Materials, ed. by K.M. Gupta, N. Gupta, Springer, Cham, 2016, pp. 531–562.
- M.E. Belkin, L. Belkin, A. Loparev, A.S. Sigov, V. Iakovlev, Long Wavelength VCSELs and VCSEL-Based Processing of Microwave Signals, in: Optoelectronics - Materials and Devices, ed. by S.L. Pyshkin, J. Ballato, InTechOpen, 2015.
- E. Kapon, A. Sirbu, Power-efficient answer, Nat. Photonics, 2009, vol. 3, no. 1, pp. 27–29.
- S.S. Rochas, I.I. Novikov, L.Y. Karachinsky, A.V. Babichev, S.A. Blokhin, V.N. Nevedomskii, K.O. Voropaev, A.Y. Egorov, Wafer fusion technique features for near-IR laser sources, J. Phys: Conf. Ser., 2021, vol. 2103, no. 1, art. no. 012107.
- G.D. Sulka, K. Hnida, Distributed Bragg reflector based on porous anodic alumina fabricated by pulse anodization, Nanotechnology, 2012, vol. 23, no. 7, art. no. 075303.
- T. Hamaguchi, H. Nakajima, N. Fuutagawa, GaN-based vertical-cavity surface-emitting lasers incorporating dielectric distributed Bragg reflectors, Appl. Sci, 2019, vol. 9, no. 4, art. no. 733.
- J.M. Dallesasse, D.G. Deppe, III-V oxidation: Discoveries and applications in vertical-cavity surface-emitting lasers, Proc. IEEE, 2013, vol. 101, no. 10, pp. 2234–2242.
- S. Spiga, W. Soenen, A. Andrejew, D.M. Schoke, X. Yin, J. Bauwelinck, G. Boehm, M.C. Amann, Single-Mode High-Speed 1.5-μm VCSELs, J. Light. Technol., 2017, vol. 35, no. 4, pp. 727–733.
- S.A. Blokhin, M.A. Bobrov, A.G. Kuzmenkov, A.A. Blokhin, A.P. Vasil’ev, Y.A. Guseva, M.M. Kulagina, I.O. Karpovsky, Y.M. Zadiranov, S.I. Troshkov, N.D. Prasolov, P.N. Brunkov, V.S. Levitsky, V. Lisak, N.A. Maleev, V.M. Ustinov, A study of distributed dielectric bragg reflectors for vertically emitting lasers of the near-IR range, Tech. Phys. Lett., 2016, vol. 42, no. 10, pp. 1049–1053.
- T. Gründl, P. Debernardi, M. Müller, C. Grasse, P. Ebert, K. Geiger, M. Ortsiefer, G. Böhm, R. Meyer, M.C. Amann, Record single-mode, high-power VCSELs by inhibition of spatial hole burning, IEEE J. Sel. Top. Quantum Electron., 2013, vol. 19, no. 4, art. no. 1700913.
- S.W. Corzine, R.H. Yan, L.A. Coldren, A tanh substitution technique for the analysis of abrupt and graded interface multilayer dielectric stacks, IEEE J. Quantum Electron., 1991, vol. 27, no. 9, pp. 2086–2090.
- K.J. Ebeling, Integrated Optoelectronics, Springer Berlin, Heidelberg, 1993.
- P. Maćkowiak, M. Wasiak, T. Czyszanowski, R.P. Sarzała, W. Nakwaski, Designing guidelines for nitride VCSELs resonator, Optica Applicata, 2002, vol. 32, no. 3. pp. 493–502.
- C. Wilsem, H. Temkin, L. Coldren, Vertical-Cavity Surface-Emitting Lasers: Design, Fabrication, Characterization, and Applications, Cambridge University Press, Cambridge, 2001.
- L. Mutter, V. Iakovlev, A. Caliman, A. Mereuta, A. Sirbu, E. Kapon, 1.3μm-wavelength phase-locked VCSEL arrays incorporating patterned tunnel junction, Opt. Express, 2009, vol. 17, no. 10, pp. 8558–8566.
- C.C. Shen, T.C. Hsu, Y.W. Yeh, C.Y. Kang, Y.T. Lu, H.W. Lin, H.Y. Tseng, Y.T. Chen, C.Y. Chen, C.C. Lin, C.H. Wu, P.T. Lee, Y. Sheng, C.H. Chiu, H.C. Kuo, Design, Modeling, and Fabrication of High-Speed VCSEL with Data Rate up to 50 Gb/s, Nanoscale Res. Lett., 2019, vol. 14, no. 1, art. no. 276.
- A.N. AL-Omari, I.K. AL-Kofahi, K.L. Lear, Fabrication, performance and parasitic parameter extraction of 850 nm high-speed vertical-cavity lasers, Semicond. Sci. Technol., 2009, vol. 24, no. 9, art. no. 095024.
- A.C. Barone, Short pulse generation from semiconductor lasers: characterization, modeling and applications, Ingeniero en Electrónica, Madrid, 2011.
- R. Pu, E.M. Hayes, C.W. Wilmsen, K.D. Choquette, H.Q. Hou, K.M. Geib, Comparison of techniques for bonding VCSELS directly to ICs, J. Opt. A Pure Appl. Opt., 1999, vol. 1, no. 2, art. no. 324.
- A. Olsson, J. Tiira, M. Partanen, T. Hakkarainen, E. Koivusalo, A. Tukiainen, M. Guina, J. Oksanen, Optical Energy Transfer and Loss Mechanisms in Coupled Intracavity Light Emitters, IEEE Trans. Electron Devices, 2016, vol. 63, no. 9, pp. 3567–3573.
- R.F. Carson, M.E. Warren, P. Dacha, T. Wilcox, J.G. Maynard, D.J. Abell, K.J. Otis, J.A. Lott, Progress in high-power high-speed VCSEL arrays, Proc. SPIE 9766, Vertical-Cavity Surface-Emitting Lasers (VCSELs) XX, 2016, art. no. 97660B.
- J. Ferrara, W. Yang, L. Zhu, P. Qiao, C.J. Chang-Hasnain, Heterogeneously integrated long-wavelength VCSEL using silicon high contrast grating on an SOI substrate, Opt. Express, 2015, vol. 23, no. 3, pp. 2512–2523.
- W.J. Wang, C. Li, H.Y. Zhou, H. Wu, X.X. Luan, L. Shi, X. Guo, Optimal oxide-aperture for improving the power conversion efficiency of VCSEL arrays, Chinese Phys. B, 2015, vol. 24, no. 2, art. no. 024209.
- A. Larsson, E. Simpanen, J.S. Gustavsson, E. Haglund, E.P. Haglund, T. Lengyel, P.A. Andrekson, W.V. Sorin, S. Mathai, M. Tan, S.R. Bickham, 1060 nm VCSELs for long-reach optical interconnects, Opt. Fiber Technol., 2018, vol. 44, pp. 36–42.
- A. Haglund, C. Carlsson, J. Gustavsson, J. Halonen, A.G. Larsson, Comparative study of the high-speed digital modulation performance of single- and multimode oxide confined VCSELs for free space optical interconnects, Proc. SPIE 4649, Vertical-Cavity Surface-Emitting Lasers VI, 2002, pp. 272–280.
- D.G. Deppe, M. Li, X. Yang, M. Bayat, Advanced VCSEL Technology: Self-Heating and Intrinsic Modulation Response, IEEE J. Quantum Electron., 2018, vol. 54, no. 3, art. no. 2400209.
- Y. Zhang, J. Zhao, Analysis of common failure causes in oxide VCSELs, Proc. SPIE 12164, International Conference on Optoelectronic Materials and Devices (ICOMD 2021), 2022, art. no. 121641H.
- J.J. Pao, T.-C. Wu, W. Kyi, M. Riaziat, J.A. Lott, Reliability and manufacturability of 25G VCSELs with oxide apertures formed by in-situ monitoring, Proc. SPIE 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X, 2017, art. no. 1011519.
- B. Kesler, T. O’Brien, J.M. Dallesasse, Transverse mode control in proton-implanted and oxide-confined VCSELs via patterned dielectric anti-phase filters, Proc. SPIE 10122, Vertical-Cavity Surface-Emitting Lasers XXI, 2017, art. no. 101220L.
- O. Ueda, S. Tomiya, Grown-in defects and thermal instability affecting the reliability of lasers: III–Vs versus III-nitrides, in: Reliability of Semiconductor Lasers and Optoelectronic Devices, ed. by R.W. Herrick, O. Ueda, Woodhead Publishing Series in Electronic and Optical Materials, Elsevier, 2021, pp. 177–238.
- J.A. Kearns, J. Back, N.C. Palmquist, D.A. Cohen, S.P. DenBaars, S. Nakamura, Inhomogeneous Current Injection and Filamentary Lasing of Semipolar ( ) Blue GaN-Based Vertical-Cavity Surface-Emitting Lasers with Buried Tunnel Junctions, Phys. Status Solidi A, 2020, vol. 217, no. 7, art. no. 1900718.
- J.S. Harris, H. Bae, T. Sarmiento, GaInNAs(Sb) long-wavelength VCSELs, in: VCSELs: Fundamentals, Technology and Applications of Vertical-Cavity Surface-Emitting Lasers, ed. by R. Michalzik, Springer Series in Optical Sciences, vol 166, Springer, Berlin, Heidelberg, 2013, pp. 353–377.
- A. Bachmann, K. Kashani-Shirazi, S. Arafin, M.C. Amann, GaSb-based VCSEL with buried tunnel junction for emission around 2.3 μm, IEEE J. Sel. Top. Quantum Electron., 2009, vol. 15, no. 3, pp. 933–940.
- S. Lee, C.A. Forman, J. Kearns, J.T. Leonard, D.A. Cohen, S. Nakamura, S.P. DenBaars, Demonstration of GaN-based vertical-cavity surface-emitting lasers with buried tunnel junction contacts, Opt. Express, 2019, vol. 27, no. 22, pp. 31621–31628.
- S. Arafin, A. Bachmann, M.C. Amann, Transverse-mode characteristics of GaSb-based VCSELs with buried-tunnel junctions, IEEE J. Sel. Top. Quantum Electron., 2011, vol. 17, no. 6, pp. 1576–1583.
- S. Blokhin, A. Babichev, A. Gladyshev, L. Karachinsky, I. Novikov, A. Blokhin, S. Rochas, D. Denisov, K. Voropaev, A. Ionov, N. Ledentsov, A. Egorov, Wafer‐fused 1300 nm VCSELs with an active region based on superlattice, Electron. Lett., 2021, vol. 57, no. 18, pp. 697–698.
- S.A. Blokhin, M.A. Bobrov, A.A. Blokhin, A.P. Vasil’ev, A.G. Kuz’menkov, N.A. Maleev, S.S. Rochas, A.G. Gladyshev, A.V. Babichev, I.I. Novikov, L.Ya. Karachinsky, D.V. Denisov, K.O. Voropaev, A.S. Ionov, A.Yu. Egorov, V.M. Ustinov, The Effect of a Saturable Absorber in Long-Wavelength Vertical-Cavity Surface-Emitting Lasers Fabricated by Wafer Fusion Technology, Tech. Phys. Lett., 2020, vol. 46, no. 12, pp. 1257–1262.
- H. Soda, K.I. Iga, C. Kitahara, Y. Suematsu, GaInAsP/InP surface emitting injection lasers, Jpn. J. Appl. Phys., 1979, vol. 18, no. 12, art. no. 2329.
- Y. Arakawa, H. Sakaki, Multidimensional quantum well laser and temperature dependence of its threshold current, Appl. Phys. Lett., 1982, vol. 40, no. 11, pp. 939–941.
- F.H. Peters, M.H. MacDougal, High-speed high-temperature operation of vertical-cavity surface-emitting lasers, IEEE Photonics Technol. Lett., 2001, vol. 13, no. 7, pp. 645–647.
- J. Wang, M. Keever, Z.-W. Feng, T. Fanning, C. Chu, A. Sridhara, F. Hopfer, T. Sale, A.-N. Cheng, B. Shao, L. Ding, P. Wen, H.-H. Chang, C. Wang, D.C.W. Hui, L. Giovane, 28 Gb/s 850 nm oxide VCSEL development at Avago, Proc. SPIE 8639, Vertical-Cavity Surface-Emitting Lasers XVII, 2013, art. no. 86390K.
- S.A. Blokhin, J.A. Lott, A. Mutig, G. Fiol, N.N. Ledentsov, M.V. Maximov, A.M. Nadtochiy, V.A. Shchukin, D. Bimberg, Oxide-confined 850 nm VCSELs operating at bit rates up to 40 Gbit/s, Electron. Lett., 2009, vol. 45, no. 10, pp. 501–503.
- P. Westbergh, J.S. Gustavsson, B. Kogel, A. Haglund, A. Larsson, A. Mutig, A. Nadtochiy, D. Bimberg, 850 nm VCSEL operating error-free at 40 Gbit/s, in: 22nd IEEE International Semiconductor Laser Conference, ed. by Peter. M. Smowton, 2010, pp. 154–155.
- B. Kögel, J.S. Gustavsson, E. Haglund, R. Safaisini, A. Joel, P. Westbergh, M. Geen, R. Lawrence, A. Larsson, High-speed 850 nm VCSELs with 28 GHz modulation bandwidth operating error-free up to 44 Gbit/s, Electron. Lett., 2012, vol. 48, no. 18, pp. 1145–1147.
- P. Westbergh, E.P. Haglund, E. Haglund, R. Safaisini, J.S. Gustavsson, A. Larsson, High‐speed 850 nm VCSELs operating error free up to 57 Gbit/s, Electron. Lett., 2013, vol. 49, no. 16, pp. 1021–1023.
- D.M. Kuchta, A.V. Rylyakov, C.L. Schow, J.E. Proesel, C. Baks, P. Westbergh, J. S. Gustavsson, A. Larsson, 64Gb/s Transmission over 57m MMF using an NRZ Modulated 850nm VCSEL, in: Optical Fiber Communication Conference, OSA Technical Digest, Optica Publishing Group, 2014, art. no. Th3C.2.
- P. Westbergh, R. Safaisini, E. Haglund, J.S. Gustavsson, A. Larsson, A. Joel, High-speed 850 nm VCSELs with 28 GHz modulation bandwidth for short reach communication, Proc. SPIE 8639, Vertical-Cavity Surface-Emitting Lasers XVII, 2013, art. no. 86390X.
- F. Tan, C.H. Wu, M. Feng, N. Holonyak, Energy efficient microcavity lasers with 20 and 40 Gb/s data transmission, Appl. Phys. Lett., 2011, vol. 98, no. 19, art. no. 191107.
- S. Shinada, F. Koyama, N. Nishiyama, M. Arai, K. Iga, Single high-order transverse mode 850 nm VCSEL with micromachined surface relief, in: Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics, Postconference Technical Digest (IEEE Cat. No. 01CH37170), 2001, pp. 106–107.
- R. Safaisini, E. Haglund, P. Westbergh, J.S. Gustavsson, A. Larsson, 20 Gbit/s data transmission over 2 km multimode fibre using 850 nm mode filter VCSEL, Electron. Lett., 2014, vol. 50, no. 1, pp. 40–42.
- F. Mederer, I. Ecker, J. Joos, M. Kicherer, H.J. Unold, K.J. Ebeling, M. Grabherr, R. Jager, R. King, D. Wiedenmann, High performance selectively oxidized VCSELs and arrays for parallel high-speed optical interconnects, IEEE Trans. Adv. Packag., 2001, vol. 24, no. 2, pp. 442–449.
- J.-W. Shi, W.-C. Weng, F.-M. Kuo, J.-I. Chyi, S. Pinches, M. Geen, A. Joel, Oxide-relief vertical-cavity surface-emitting lasers with extremely high data-rate/power-dissipation ratios, in: Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2011, OSA Technical Digest (CD), Optica Publishing Group, 2011, art. no. OThG2.
- R.H. Johnson, D.M. Kuchta, 30 Gb/s directly modulated 850 nm datacom VCSELs, in: Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD), Optica Publishing Group, 2008, art. no. CPDB2.
- R. Michalzik, F. Mederer, H. Roscher, M. Stach, H.J. Unold, D. Wiedenmann, R. King, M. Grabherr, E. Kube, Design and communication applications of short-wavelength VCSELs, Proc. SPIE 4905, Materials and Devices for Optical and Wireless Communications, 2002, pp. 310–321.
- F.-I. Lai, T.-H. Hsueh, Y.-H. Chang, H.-C. Kuo, S.C. Wang, L.-H. Laih, C.P. Song, H.P. Yang, 10 Gb/s single-mode vertical-cavity surface-emitting laser with large aperture and oxygen implantation, Semicond. Sci. Technol., 2004, vol. 19, no. 8, pp. L86–L89.
- C.-L. Tsai, F.-M. Lee, F.-Y. Cheng, M.-C. Wu, S.-C. Ko, H.-L. Wang, W.-J. Ho, Silicon oxide-planarized single-mode 850-nm VCSELs with TO package for 10 Gb/s data transmission, IEEE Electron Device Lett., 2005, vol. 26, no. 5, pp. 304–307.
- T. Tanigawa, T. Onishi, S. Nagai, T. Ueda, 12.5-Gbps Operation of 850-nm Vertical-Cavity Surface-Emitting Lasers With Reduced Parasitic Capacitance by BCB Planarization Technique, IEEE J. Quantum Electron., 2006, vol. 42, no. 8, pp. 785–790.
- A. Larsson, J.S. Gustavsson, P. Westbergh, E. Haglund, E.P. Haglund, E. Simpanen, T. Lengyel, K. Szczerba, M. Karlsson, VCSEL design and integration for high-capacity optical interconnects, Proc. SPIE 10109, Optical Interconnects XVII, 2017, art. no. 101090M.
- C.-H. Wu, W.-H. Cheng, M. Feng, C.-H. Wu, T.-Y. Huang, J. Qiu, W. Fu, C.-Y. Peng, T.-T. Shih, J.-J. Huang, H.-C. Kuo, G.-R. Lin, 50 Gb/s Error-Free Data Transmission Using a NRZ-OOK Modulated 850 nm VCSEL, in: 2018 European Conference on Optical Communication (ECOC), 2018.
- H.-Y. Kao, C.-T. Tsai, S.-F. Leong, C.-Y. Peng, Y.-C. Chi, H.-Y. Wang, H.-C. Kuo, C.-H. Wu, W.-H. Cheng, G.-R. Lin, Single-mode VCSEL for pre-emphasis PAM-4 transmission up to 64 Gbit/s over 100–300 m in OM4 MMF, Photonics Res., 2018, vol. 6, no. 7, pp. 666–673.
- P. Moser, J.A. Lott, P. Wolf, G. Larisch, A. Payusov, N.N. Ledentsov, D. Bimberg, Energy-Efficient Oxide-Confined 850-nm VCSELs for Long-Distance Multimode Fiber Optical Interconnects, IEEE J. Sel. Top. Quantum Electron., 2013, vol. 19, no. 2, art. no. 7900406.
- T.-Y. Huang, J. Qiu, C.-H. Wu, H.-T. Cheng, M. Feng, H.-C. Kuo, C.-H. Wu, A NRZ-OOK Modulated 850-nm VCSEL with 54 Gb/s Error-Free Data Transmission, in: 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/ Europe-EQEC), 2019.
- C.-Y. Huang, H.-Y. Wang, C.-Y. Peng, C.-T. Tsai, C.-H. Wu, G.-R. Lin, Multimode VCSEL Enables 42-GBaud PAM-4 and 35-GBaud 16-QAM OFDM for 100-m OM5 MMF Data Link, IEEE Access, 2020, vol. 8, pp. 36963–36973.
- N. Ledentsov Jr., Ł. Chorchos, O.Yu. Makarov, V.A. Shchukin, V.P. Kalosha, J.R. Kropp, J.P. Turkiewicz, C. Kottke, V. Jungnickel, R. Freund, N.N. Ledentsov, Serial data transmission at 224 Gbit/s applying directly modulated 850 and 910 nm VCSELs, Electron. Lett., 2021, vol. 57, no. 19, pp. 735–737.
- N. Ledentsov, L. Chorchos, O. Makarov, J.R. Kropp, V.A. Shchukin, V.P. Kalosha, J.P. Turkiewicz, N.N. Ledentsov, Narrow spectrum VCSEL development for high performance 100G transceivers and increased transmission distance over multimode fiber, Proc. SPIE 11704, Vertical-Cavity Surface-Emitting Lasers XXV, 2021, art. no. 117040P.
- K. Panajotov, R. Schatz, Coupled-Cavity VCSEL with an Integrated Electro-Absorption Modulator: Small- and Large-Signal Modulation Analysis, Appl. Sci., 2020, vol. 10, no. 17, art. no. 6128.
- N.N. Ledentsov, J.A. Lott, D. Bimberg, A. Mutig, G. Fiol, S.A. Blokhin, A.M. Nadtochiy, V.A. Shchukin, J. Kropp, I.I. Novikov, L.Ya. Karachinsky, M.V. Maximov, High-speed single-mode quantum dot and quantum well VCSELs, Proc. SPIE 7952, Vertical-Cavity Surface-Emitting Lasers XV, 2011, art. no. 79520J.
- H.R. Ibrahim, A.M.A. Hassan, M. Ahmed, F. Koyama, Single-mode and High-speed Intracavity Metal Aperture VCSEL with Transverse Coupled Cavity Effect, in: 2020 European Conference on Optical Communications (ECOC), 2020.
- D. Ellafi, V. Iakovlev, A. Sirbu, G. Suruceanu, Z. Mickovoc, A. Caliman, A. Mereuta, E. Kapon, Impact of Selective DBR Surface Etching on the Performance of 1300 and 1500-nm Wafer-Fused VCSELs, in: 2014 International Semiconductor Laser Conference, 2014, pp. 211–212.
- P. Schnitzer, R. Jäger, C. Jung, R. Michalzik, D. Wiedenmann, F. Mederer, K. J. Ebeling, Biased and bias-free multi-Gb/s data links using GaAs VCSEL’s and 1300-nm single-mode fiber, IEEE Photonics Technol. Lett., 1998, vol. 10, no. 12, pp. 1781–1783.
- S.A. Blokhin, N. Ledentsov Jr., S.S. Rochas, A.V. Babichev, A.G. Gladyshev, L. Chorchos, O.Yu. Makarov, L.Ya. Karachinsky, I.I. Novikov, A.A. Blokhin, M.A. Bobrov, N.A. Maleev, V.V. Andryushkin, K.O. Voropaev, I.O. Zhumaeva, V.M. Ustinov, A.Yu. Egorov, N.N. Ledentsov, 1300-nm wafer-fused VCSELs with InGaAs/InAlGaAs superlattice-based active region, Proc. SPIE 12020, Vertical-Cavity Surface-Emitting Lasers XXVI, 2022, art. no. 120200K.
- G. Stepniak, A. Lewandowski, J.R. Kropp, N.N. Ledentsov, V.A. Shchukin, N. Ledentsov Jr., G. Schaefer, M. Agustin, J.P. Turkiewicz, 54 Gbit/s OOK transmission using single‐mode VCSEL up to 2.2 km MMF, Electron. Lett., 2016, vol. 52, no. 8, pp. 633–635.
- S.A. Blokhin, A.V. Babichev, A.G. Gladyshev, L.Ya. Karachinsky, I.I. Novikov, A.A. Blokhin, M.A. Bobrov, N.A. Maleev, V.V. Andryushkin, D.V. Denisov, K.O. Voropaev, I.O. Zhumaeva, V.M. Ustinov, A.Yu. Egorov, N.N. Ledentsov, High Power Single Mode 1300-nm Superlattice Based VCSEL: Impact of the Buried Tunnel Junction Diameter on Performance, IEEE J. Quantum Electron., 2022, vol. 58, no. 2, art. no. 2400115.
- M. Müller, C. Grasse, M.C. Amann, InP-based 1.3 μm and 1.55 μm short-cavity VCSELs suitable for telecom- and datacom-applications, in: 2012 14th International Conference on Transparent Optical Networks (ICTON), 2012.
- A. Ramakrishnan, G. Steinle, D. Supper, C. Degen, G. Ebbinghaus, Electrically pumped 10 Gbit/s MOVPE-grown monolithic 1.3 μm VCSEL with GaInNAs active region, Electron. Lett., 2002, vol. 38, no. 7, pp. 322–324.
- W. Hofmann, M. Müller, A. Nadtochiy, C. Meltzer, A. Mutig, G. Böhm, J. Rosskopf, D. Bimberg, M.-C. Amann, C. Chang-Hasnain, 22-Gb/s Long Wavelength VCSELs, Opt. Express, 2009, vol. 17, no. 20, pp. 17547–17554.
- H. Shimizu, C. Setiagung, M. Ariga, Y. Ikenaga, K. Kumada, T. Hama, N. Ueda, N. Iwai, A. Kasukawa, 1.3-μm-Range GaInNAsSb-GaAs VCSELs, IEEE J. Sel. Top. Quantum Electron., 2003, vol. 9, no. 5, pp. 1214–1219.
- S. Bischoff, F. Romstad, M. Juhl, M. Madsen, J. Hanberg, D. Birkedal, 2.5 Gbit/s modulation of 1300 nm single-mode photonic crystal VCSELs, in: 2006 Optical Fiber Communication Conference and the 2006 National Fiber Optic Engineers Conference, 2006.
- H. Riechert, A. Ramakrishnan, G. Steinle, Development of InGaAsN based 1.3 μm VCSELs, Semicond. Sci. Technol., 2002, vol. 17, no. 8, art. no. 892.
- A. Mircea, A. Caliman, V. Iakovlev, A. Mereuta, G. Suruceanu, C.A. Berseth, P. Royo, A. Syrbu, E. Kapon, Cavity mode-gain peak tradeoff for 1320-nm wafer-fused VCSELs with 3-mW single-mode emission power and 10-Gb/s modulation speed up to 70 °C, IEEE Photonics Technol. Lett., 2007, vol. 19, no. 2, pp. 121–123.
- M.R. Park, O.K. Kwon, W.S. Han, K.H. Lee, S.J. Park, B.S. Yoo, All-epitaxial InAlGaAs-InP VCSELs in the 1.3-1.6-μm wavelength Range for CWDM band applications, IEEE Photonics Technol. Lett., 2006, vol. 18, no. 16,
pp. 1717–1719. - D. Ellafi, V. Iakovlev, A. Sirbu, S. Grigore, Z. Mickovic, A. Caliman, A. Mereuta, E. Kapon, Effect of Cavity Lifetime Variation on the Static and Dynamic Properties of 1.3-μm Wafer-Fused VCSELs, IEEE J. Sel. Top. Quantum Electron., 2015, vol. 21, no. 6, art. no. 1700509.
- N. Ledentsov Jr., M. Agustin, V.A. Shchukin, J.-R. Kropp, N.N. Ledentsov, Ł. Chorchos, J.P. Turkiewicz, Z. Khan, C.-L. Cheng, J. W. Shi, N. Cherkashin, Quantum dot 850 nm VCSELs with extreme high temperature stability operating at bit rates up to 25 Gbit/s at 150 °C, Solid-State Electron., 2019, vol. 155, pp. 150–158.
- N. Nishiyama, C. Caneau, S. Tsuda, G. Guryanov, M. Hu, R. Bhat, and C.E. Zah, 10-Gb/s error-free transmission under optical reflection using isolator-free 1.3-μm InP-based vertical-cavity surface-emitting lasers, IEEE Photonics Technol. Lett., 2005, vol. 17, no. 8, pp. 1605–1607.
- H.-C. Yu, J.-S. Wang, Y.-K. Su, S.-J. Chang, H.-C. Kuo, F.-I. Lai, Y.H. Chang, H.-P.D. Yang, Low threshold current, low resistance 1.3 μm InAs-InGaAs quantum-dot VCSELs with fully doped DBRs grown by MBE, Proc. SPIE 6484, Vertical-Cavity Surface-Emitting Lasers XI, 2007, art. no. 64840E.
- Y. Onishi, N. Saga, K. Koyama, H. Doi, T. Ishizuka, T. Yamada, K. Fujii, H. Mori, J. Hashimoto, M. Shimazu, T. Katsuyama, 100°C, 10 Gbps operation of buried tunnel junction GalnNAs VCSELs, in: 2008 34th European Conference on Optical Communication, 2008, pp. 181–182.
- A.V. Babichev, L.Ya. Karachinsky, I.I. Novikov, A.G. Gladyshev, S.A. Blokhin, S. Mikhailov, V. Iakovlev, A. Sirbu, G. Stepniak, L. Chorchos, J.P. Turkiewicz, K.O. Voropaev, A.S. Ionov, M. Agustin, N.N. Ledentsov, A.Yu. Egorov, 6-mW Single-Mode High-Speed 1550-nm Wafer-Fused VCSELs for DWDM Application, IEEE J. Quantum Electron., 2017, vol. 53, no. 6, art. no. 2400808.
- M. Muller, W. Hofmann, T. Grundl, M. Horn, P. Wolf, R.D. Nagel, E. Ronneberg, G. Bohm, D. Bimberg, M.C. Amann, 1550-nm High-Speed Short-Cavity VCSELs, IEEE J. Sel. Top. Quantum Electron., 2011, vol. 17, no. 5, pp. 1158–1166.
- F. Karinou, N. Stojanovic, G. Goeger, C. Xie, M. Ortsiefer, A. Daly, R. Hohenleitner, B. Kögel, C. Neumeyr, 28 Gb/s NRZ-OOK using 1530-nm VCSEL, direct detection and MLSE receiver for optical interconnects, in: 2015 IEEE Optical Interconnects Conference, 2015, pp. 20–21.
- W. Hofmann, M. Müller, P. Wolf, A. Mutig, T. Gründl, G. Böhm, D. Bimberg, M.-C. Amann, 40 Gbit/s modulation of 1550 nm VCSEL, Electron. Lett., 2011, vol. 47, no. 4, pp. 270–271.
- Y. Rao, W. Yang, C. Chase, M.C.Y. Huang, D.P. Worland, S. Khaleghi, M.R. Chitgarha, M. Ziyadi, A.E. Willner, C.J. Chang-Hasnain, Long-wavelength VCSEL using high-contrast grating, IEEE J. Sel. Top. Quantum Electron., 2013, vol. 19, no. 4, art. no. 1701311.
- A. Syrbu, A. Mereuta, V. Iakovlev, A. Caliman, P. Royo, E. Kapon, 10 Gbps VCSELs with high single mode output in 1310nm and 1550 nm wavelength bands, in: OFC/NFOEC 2008 - 2008 Conference on Optical Fiber Communication/National Fiber Optic Engineers Conference, 2008.
- K. Zogal, S. Paul, C. Gierl, P. Meissner, F. Kuppers, Up to 12-Gbps transmission over 6.3-km SMF using a directly modulated bulk micromachined MEMS tunable VCSEL, in: 2015 European Conference on Optical Communication (ECOC), 2015.
- J.A. Lott, V.A. Shchukin, N.N. Ledentsov, A. Stinz, F. Hopfer, A. Mutig, G. Fiol, D. Bimberg, S.A. Blokhin, L.Y. Karachinsky, I.I. Novikov, M.V. Maximov, N.D. Zakharov, P. Werner, 20 Gbit/s error free transmission with ~850 nm GaAs-based vertical cavity surface emitting lasers (VCSELs) containing InAs-GaAs submonolayer quantum dot insertions, Proc. SPIE 7211, Physics and Simulation of Optoelectronic devices XVII, 2009, art. no. 721114.
- N. Nishiyama, C. Caneau, J.D. Downie, M. Sauer, C.E. Zah, 10-Gbps 1.3 and 1.55-μm InP-based VCSELs: 85°C 10-km error-free transmission and room temperature 40-km transmission at 1.55-μm with EDC, in: 2006 Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference, 2006.
- S. Paul, J. Cesar, M. Malekizandi, M.T. Haidar, N. Heermeier, M. Ortsiefer, C. Neumeyr, C. Gréus, M.H. Eiselt, I. Ibrahim, H. Schmidt, J. Schmidt, F. Küppers, Towards a SFP+ module for WDM applications using an ultra-widely-tunable high-speed MEMS-VCSEL, Proc. SPIE 10122, Vertical-Cavity Surface-Emitting Lasers XXI, 2017, art. no. 1012209.
- A. Dochhan, N. Eiselt, R. Hohenleitner, H. Griesser, M. Eiselt, M. Ortsiefer, C. Neumeyr, J.J.V. Olmos, I.T. Monroy, J.P. Elbers, 56 Gb/s DMT transmission with VCSELs in 1.5 um wavelength range over up to 12 km for DWDM intra-data center connects, in: ECOC 2016; 42nd European Conference on Optical Communication, 2016, pp. 391–393.
- J.-W. Shi, C.-C. Wei, J. Chen, N.N. Ledentsov, Y.-J. Yang, Single-mode 850-nm vertical-cavity surface-emitting lasers with Zn-diffusion and oxide-relief apertures for > 50 Gbit/sec OOK and 4-PAM transmission, Proc. SPIE 10122, Vertical-Cavity Surface-Emitting Lasers XXI, 2017, art. no. 101220F.
- A. Caliman, A. Sirbu, V. Iakovlev, A. Mereuta, P. Wolf, D. Bimberg, E. Kapon, >25 Gbps direct modulation and data transmission with 1310 nm waveband wafer fused VCSELs, in:Optical Fiber Communications Conference, OSA Technical Digest (online), Optica Publishing Group, 2016, art. no. Tu3D.1.
- P. Westbergh, J.S. Gustavsson, Å. Haglund, M. Skold, A. Joel, A. Larsson, High-Speed, Low-Current-Density 850 nm VCSELs, IEEE J. Sel. Top. Quantum Electron., 2009, vol. 15, no. 3, pp. 694–703.
- E. Haglund, P. Westbergh, J.S. Gustavsson, E.P. Haglund, A. Larsson, M. Geen, A. Joel, 30 GHz bandwidth 850 nm VCSEL with sub‐100 fJ/bit energy dissipation at 25–50 Gbit/s, Electron. Lett., 2015, vol. 51, no. 14, pp. 1096–1098.
- D.M. Kuchta, A.V. Rylyakov, C.L. Schow, J.E. Proesel, C.W. Baks, P. Westbergh, J.S. Gustavsson, A. Larsson, A 50 Gb/s NRZ Modulated 850 nm VCSEL Transmitter Operating Error Free to 90 °C, J. Light. Technol., 2015, vol. 33, no. 4, pp. 802–810.
- S.A. Nikishin, III-nitride short period superlattices for deep UV light emitters, Appl. Sci., 2018, vol. 8, no. 12, art. no. 2362.
- L.Ya. Karachinsky, I.I. Novikov, A.V. Babichev, A.G. Gladyshev, E.S. Kolodeznyi, S.S. Rochas, A.S. Kurochkin, Yu.K. Bobretsova, A.A. Klimov, D.V. Denisov, K.O. Voropaev, A.S. Ionov, V.E. Bougrov, A.Yu. Egorov, Optical Gain in Laser Heterostructures with an Active Area Based on an InGaAs/InGaAlAs Superlattice, Opt. Spectrosc., 2019, vol. 127, no. 6, pp. 1053–1056.
- D.M. Kuchta, C.L. Schow, A.V. Rylyakov, J.E. Proesel, F.E. Doany, C. Baks, B.H. Hamel-Bissell, C. Kocot, L. Graham, R. Johnson, G. Landry, E. Shaw, A. MacInnes, J. Tatum, A 56.1Gb/s NRZ Modulated 850nm VCSEL-Based Optical Link, in: Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (online), Optica Publishing Group, 2013, art. no. OW1B.5.
- J.-W. Shi, J.-C. Yan, J.-M. Wun, J. Chen, Y.-J. Yang, Oxide-Relief and Zn-Diffusion 850-nm Vertical-Cavity Surface-Emitting Lasers With Extremely Low Energy-to-Data-Rate Ratios for 40 Gbit/s Operations, IEEE J. Sel. Top. Quantum Electron., 2013, vol. 19, no. 2, art. no. 7900208.
- A. Gatto, A. Boletti, P. Boffi, C. Neumeyr, M. Ortsiefer, E. Ronneberg, and M. Martinelli, 1.3-μm VCSEL Transmission Performance up to 12.5 Gb/s for Metro Access Networks, IEEE Photonics Technol. Lett., 2009, vol. 21, no. 12, pp. 778–780.
- P. Westbergh, R. Safaisini, E. Haglund, J.S. Gustavsson, A. Larsson, M. Geen, R. Lawrence, A. Joel, High-Speed Oxide Confined 850-nm VCSELs Operating Error-Free at 40 Gb/s up to 85°C, IEEE Photonics Technol. Lett., 2013, vol. 25, no. 8, pp. 768–771.
- R. Michalzik, K.J. Ebeling, M. Kicherer, F. Mederer, R. King, H. Unold, R. Jäger, High-performance VCSELs for optical data links, IEICE Trans. Commun., 2001, vol. E85-B, no. 5, pp. 1255–1264.
- A. Mereuta, G. Suruceanu, A. Caliman, V. Iacovlev, A. Sirbu, E. Kapon, 10-Gb/s and 10-km error-free transmission up to 100°C with 1.3-μm wavelength wafer-fused VCSELs, Opt. Express, 2009, vol. 17, no. 15, pp. 12981–12986.
- M.C. Amann, W. Hofmann, InP-based long-wavelength VCSELs and VCSEL arrays, IEEE J. Sel. Top. Quantum Electron., 2009, vol. 15, no. 3, pp. 861–868.
- S. Spiga, M. Muller, M.C. Amann, Energy-efficient high-speed InP-based 1.3 μm short-cavity VCSELs, in: 2013 15th International Conference on Transparent Optical Networks (ICTON), 2013.
- S. Paul, C. Gierl, J. Cesar, Q.T. Le, M. Malekizandi, B. Kögel, C. Neumeyr, M. Ortsiefer, F. Küppers, 10-Gb/s direct modulation of widely tunable 1550-nm MEMS VCSEL, IEEE J. Sel. Top. Quantum Electron., 2015, vol. 21, no. 6, art. no. 1700908.
- M. Ortsiefer, R. Shau, F. Mederer, R. Michalzik, J. Rosskopf, G. Böhm, F. Köhler, C. Lauer, M. Maute, M.-C. Amann, High-speed modulation up to 10 Gbit∕s with 1.55 μm wavelength InGaAlAs VCSELs, Electron. Lett., 2002, vol. 38, no. 20, pp. 1180–1181.
- M. Ortsiefer, R. Shau, G. Böhm, F. Köhler, J. Roßkopf, G. Steinle, C. Degen, M. C. Amann, High-temperature 2.5 Gb/s vertical-cavity surface-emitting lasers at 1.55 μm wavelength, in: Proceedings 27th European Conference on Optical Communication (Cat. No.01TH8551), 2001, pp. 44–45.
- S. Paul, C. Gierl, J. Cesar, Q.T. Le, M. Malekizandi, F. Küppers, B. Kögel, J. Rosskopf, C. Gréus, M. Görblich, Y. Xu, C. Neumeyr, M. Ortsiefer, High speed surface micromachined MEMS tunable VCSEL for telecom wavelengths, in: 2015 Conference on Lasers and Electro-Optics (CLEO), OSA Technical Digest (online), Optica Publishing Group, 2015, art. no. AM3K.1.
- A. Ahmadian, Laser diode modulation under large signal conditions, in: 2013 21st Iranian Conference on Electrical Engineering (ICEE), 2013.
- A.Z. Goharrizi, G. Alahyarizadeh, The study of temperature effect on the performance characteristics of the InGaN-based vertical cavity surface emitting laser (VCSEL) by solving the rate equations, Int. J. Mod. Phys. B, 2016, vol. 30, no. 22, art. no. 1650150.
- J. Yan, J. Wang, C. Tang, X. Liu, M. Yang, W. Hao, Q. Zhuang, X. Cui, H. Zeng, Performance Investigation of VCSEL-Based Voltage Probe and Its Applications to HPEM Effects Diagnosis of Embedded Systems, IEEE Trans. Electromagn. Compat., 2018, vol. 60, no. 6, pp. 1923–1931.
- R. Shakhovoy, V. Sharoglazova, A. Udaltsov, A. Duplinskiy, V. Kurochkin, Y. Kurochkin, Influence of Chirp, Jitter, and Relaxation Oscillations on Probabilistic Properties of Laser Pulse Interference, IEEE J. Quantum Electron., 2021, vol. 57, no. 2, art. no. 2000307.
- W.C. Lo, W.L. Wu, C.H. Cheng, H.Y. Wang, C.T. Tsai, C.H. Wu, G.R. Lin, Effect of Chirped Dispersion and Modal Partition Noise on Multimode VCSEL Encoded with NRZ-OOK and PAM-4 Formats, IEEE J. Sel. Top. Quantum Electron., 2022, vol. 28, no. 1, art. no. 1500409.
- S.A. Blokhin, L.Ya. Karachinsky, I.I. Novikov, A.S. Payusov, A.M. Nadtochiy, M.A. Bobrov, A.G. Kuzmenkov, N.A. Maleev, N.N. Ledentsov, V.M. Ustinov, D. Bimberg, Degradation-robust 850-nm vertical-cavity surface-emitting lasers for 25Gb/s optical data transmission, Semiconductors, 2014, vol. 48, no. 1, pp. 77–82.
- P. Westbergh, J.S. Gustavsson, A. Haglund, A. Larsson, F. Hopfer, G. Fiol, D. Bimberg, A. Joel, 32 Gbit/s multimode fibre transmission using high-speed, low current density 850 nm VCSEL, Electron. Lett., 2009, vol. 45, no. 7, pp. 366–368.
Volume 4, No 4
pages 1-16
History
Receive Date:
13
December
2022
Accepted Date:
22
December
2022
Available online:
30
December
2022
© 2022 ITMO University.
This is an open access article under the terms
of the CC BY-NC 4.0 license.
Metadata is available under the terms of the CC BY 4.0 license
This is an open access article under the terms
of the CC BY-NC 4.0 license.
Metadata is available under the terms of the CC BY 4.0 license