ISSN 2687-0568
Russian

Spray-Pyrolysis Fabrication and Quality Study of β-Ga2O3 Thin Films

Authors
D.I. Panov 1 , Z. Xi 1 , V.A. Spiridonov 1 , L.V. Azina 1 , R.K. Nuryev 1 , N.D. Prasolov 2 , L.A. Sokura 1 , D.A. Bauman 1 , V.E. Bougrov 1

1 ITMO University, Kronverkskiy pr., 49, lit. A, Saint Petersburg, 197101, Russia

2 Ioffe Institute, Politekhnicheskaya str., 26, Saint Petersburg 194021, Russia

10.17586/2687-0568-2021-3-4-7-12
Adv. Mater. Technol., 2021, vol. 3, no. 4, pp. 7–12
Abstract

In this paper, we report on the successful fabrication of β-Ga2O3 thin films by spray-pyrolysis technique. We provide the data on the dependence of the quality of the β-Ga2O3 films on the regimes and parameters of fabrication. Scanning electron microscopy, atomic force microscopy and optical spectroscopy are used to analyze film properties. X-ray diffraction phase analysis of the films after heat treatment at 900°C confirms the formation of β-Ga2O3 crystallites.

Foundings

Research Program of the Scientific School: project No. 5082.2022.4.

References
Volume 3, No 4
pages 7-12
Files
History
Receive Date:  17 December 2021
Accepted Date:  22 March 2026
Available online:  22 March 2026
© 2021 ITMO University.
This is an open access article under the terms
of the CC BY-NC 4.0 license.
Metadata is available under the terms of the CC BY 4.0 license