ISSN 2687-0568
Russian

Modeling of Threading Dislocation Density Reduction in AlN/Al2O3 Porous Heterostructure

Authors
A.M. Smirnov 1 , M.A. Odnoblyudov 1, 2 , V.E. Bougrov 1 , A.E. Romanov 1

1 Institute of Advanced Data Transfer Systems, ITMO University, Kronverkskiy pr. 49, St. Petersburg 197101, Russia

2 Joint Institute of Science and Technology, Peter the Great St. Petersburg Polytechnic University, Polytekhnicheskaya 29, St. Petersburg 195251, Russia

10.17586/2687-0568-2021-3-3-21-26
Adv. Mater. Technol., 2021, vol. 3, no. 3, pp. 21–26
Abstract

We analyze the possibility for reducing the density of threading dislocations (TDs) in a porous AlN films exploring numerical calculations of thermoelastic stresses and the reaction-kinetic model of dislocation interactions. We study the distributions of the normal and shear components of the thermoelastic stress tensor in AlN film with triangular pores grown on Al2O3 substrate. We find the pore parameters that affect the decrease in the TD density in the AlN film. We compare the results of theoretical calculations with experimental data on TD density reduction in porous AlN/Al2O3 heterostructures.

Foundings

Russian Science Foundation: project No. 19-19-00617.

References
Volume 3, No 3
pages 21-26
Files
History
Receive Date:  30 August 2021
Accepted Date:  29 March 2026
Available online:  29 March 2026
© 2021 ITMO University.
This is an open access article under the terms
of the CC BY-NC 4.0 license.
Metadata is available under the terms of the CC BY 4.0 license