Численный анализ роста карбида кремния из расплава кремния, разбавленного Cr, Fe, Co, Ni, Y, Al, La, Ce, Pr, Nd и Sc. Часть 1

Авторы

А.Н. Воробьев ^1, ²

¹ АО «ГРУППА СТР» – OOO «Софт-импакт», Большой Сампсониевский пр., 64 литера «Е», офис 603, Санкт-Петербург

² НПО «Стекло и керамика», ул. Дудко, 3, Санкт-Петербург, 192029, Россия

10.17586/2687-0568-2024-6-2-47-61

Rev. Adv. Mater. Technol., 2024, vol. 6, no. 2, pp. 47–61

Аннотация

Влияние различных присадок на скорость роста кристаллического карбида кремния из растворов последовательно анализируется в рамках численного подхода. Информация, относящаяся к проблеме, найдена в имеющейся литературе и тщательно переработана. Ограничения, связанные с линией плавления-затвердевания растворов, определены из фазовых диаграмм 11 бинарных систем и учитываются в расчётах растворимости углерода при изменении температуры и состава в широких пределах. Физические свойства и коэффициенты переноса собраны для предварительной оценки и сопоставления скоростей роста. Предсказывается их насыщение и последующее падение с увеличением содержания присадок. Формулируется двухмерная задача, и демонстрируются первые двухмерные расчёты. Показывается, что добавление лантана к расплаву кремния обеспечивает существенно большую скорость роста, чем при добавлении хрома.

Ключевые слова

рост карбида кремния; расплав кремния; раствор; растворимость углерода; МРК (моделирование роста кристаллов)

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