Spray-Pyrolysis Fabrication and Quality Study of β-Ga2O3 Thin Films
Adv. Mater. Technol., 2021, vol. 3, no. 4, pp. 7–12
Аннотация
In this paper, we report on the successful fabrication of β-Ga2O3 thin films by spray-pyrolysis technique. We provide the data on the dependence of the quality of the β-Ga2O3 films on the regimes and parameters of fabrication. Scanning electron microscopy, atomic force microscopy and optical spectroscopy are used to analyze film properties. X-ray diffraction phase analysis of the films after heat treatment at 900°C confirms the formation of β-Ga2O3 crystallites.
Финансирование
Research Program of the Scientific School: project No. 5082.2022.4.
Ссылки
Том 3, № 4
Страницы 7-12
Файлы
История
Поступила в редакцию:
17
Декабря
2021
Принята:
10
Марта
2026
Доступна онлайн:
10
Марта
2026
© 2021 ITMO University.
This is an open access article under the terms
of the CC BY-NC 4.0 license.
Metadata is available under the terms of the CC BY 4.0 license
This is an open access article under the terms
of the CC BY-NC 4.0 license.
Metadata is available under the terms of the CC BY 4.0 license