ISSN 2687-0568
English

Modeling of Threading Dislocation Density Reduction in AlN/Al2O3 Porous Heterostructure

Авторы
А.М. Смирнов 1 , M.A. Odnoblyudov 1, 2 , В.Е. Бугров 1 , А.Е. Романов 1

1 Institute of Advanced Data Transfer Systems, ITMO University, Kronverkskiy pr. 49, St. Petersburg 197101, Russia

2 Joint Institute of Science and Technology, Peter the Great St. Petersburg Polytechnic University, Polytekhnicheskaya 29, St. Petersburg 195251, Russia

10.17586/2687-0568-2021-3-3-21-26
Adv. Mater. Technol., 2021, vol. 3, no. 3, pp. 21–26
Аннотация

We analyze the possibility for reducing the density of threading dislocations (TDs) in a porous AlN films exploring numerical calculations of thermoelastic stresses and the reaction-kinetic model of dislocation interactions. We study the distributions of the normal and shear components of the thermoelastic stress tensor in AlN film with triangular pores grown on Al2O3 substrate. We find the pore parameters that affect the decrease in the TD density in the AlN film. We compare the results of theoretical calculations with experimental data on TD density reduction in porous AlN/Al2O3 heterostructures.

Финансирование

Russian Science Foundation: project No. 19-19-00617.

Ссылки
Том 3, № 3
Страницы 21-26
Файлы
История
Поступила в редакцию:  30 Августа 2021
Принята:  09 Марта 2026
Доступна онлайн:  09 Марта 2026
© 2021 ITMO University.
This is an open access article under the terms
of the CC BY-NC 4.0 license.
Metadata is available under the terms of the CC BY 4.0 license